silicon and xenon-fluoride

silicon has been researched along with xenon-fluoride* in 1 studies

Other Studies

1 other study(ies) available for silicon and xenon-fluoride

Article	Year
A post silicon-on-insulator compatible smart tube technology. Lab on a chip, 2013, Mar-21, Volume: 13, Issue:6 This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF(2) isotropic silicon etching and conformal parylene coating. Topics: Electrodes; Fluorides; Micro-Electrical-Mechanical Systems; Nanotechnology; Polymers; Silicon; Temperature; Xenon; Xylenes	2013

Article

Year

A post silicon-on-insulator compatible smart tube technology.

Lab on a chip, 2013, Mar-21, Volume: 13, Issue:6

This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF(2) isotropic silicon etching and conformal parylene coating.

Topics: Electrodes; Fluorides; Micro-Electrical-Mechanical Systems; Nanotechnology; Polymers; Silicon; Temperature; Xenon; Xylenes

2013