nitrogen trifluoride has been researched along with sulfur hexafluoride in 1 studies
| Timeframe | Studies, this research(%) | All Research% |
|---|---|---|
| pre-1990 | 0 (0.00) | 18.7374 |
| 1990's | 0 (0.00) | 18.2507 |
| 2000's | 0 (0.00) | 29.6817 |
| 2010's | 1 (100.00) | 24.3611 |
| 2020's | 0 (0.00) | 2.80 |
| Authors | Studies |
|---|---|
| Cho, CH; Hong, YC; Kim, JH; Shin, DH; Shin, YW | 1 |
1 other study(ies) available for nitrogen trifluoride and sulfur hexafluoride
| Article | Year |
|---|---|
Abatement of fluorinated compounds using a 2.45GHz microwave plasma torch with a reverse vortex plasma reactor.
Topics: Air Pollutants; Atmospheric Pressure; Fluorides; Hydrodynamics; Microwaves; Nitrogen Compounds; Plasma Gases; Semiconductors; Spectroscopy, Fourier Transform Infrared; Sulfur Hexafluoride; Waste Products | 2015 |