hexamethylsilazane has been researched along with argon in 1 studies
| Timeframe | Studies, this research(%) | All Research% |
|---|---|---|
| pre-1990 | 0 (0.00) | 18.7374 |
| 1990's | 0 (0.00) | 18.2507 |
| 2000's | 0 (0.00) | 29.6817 |
| 2010's | 0 (0.00) | 24.3611 |
| 2020's | 1 (100.00) | 2.80 |
| Authors | Studies |
|---|---|
| Kiuchi, M; Murai, K; Sugimoto, S; Takeuchi, T; Yoshimura, S | 1 |
1 other study(ies) available for hexamethylsilazane and argon
| Article | Year |
|---|---|
Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films.
Topics: Argon; Carbon Compounds, Inorganic; Nanostructures; Nitrogen; Organosilicon Compounds; Silicon Compounds; Volatilization | 2021 |