Page last updated: 2024-08-21

hexamethylsilazane and argon

hexamethylsilazane has been researched along with argon in 1 studies

Research

Studies (1)

TimeframeStudies, this research(%)All Research%
pre-19900 (0.00)18.7374
1990's0 (0.00)18.2507
2000's0 (0.00)29.6817
2010's0 (0.00)24.3611
2020's1 (100.00)2.80

Authors

AuthorsStudies
Kiuchi, M; Murai, K; Sugimoto, S; Takeuchi, T; Yoshimura, S1

Other Studies

1 other study(ies) available for hexamethylsilazane and argon

ArticleYear
Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films.
    PloS one, 2021, Volume: 16, Issue:10

    Topics: Argon; Carbon Compounds, Inorganic; Nanostructures; Nitrogen; Organosilicon Compounds; Silicon Compounds; Volatilization

2021